J. Phys. IV France
Volume 03, Numéro C3, Août 1993Proceedings of the Ninth European Conference on Chemical Vapour Deposition
|Page(s)||C3-75 - C3-82|
J. Phys. IV France 03 (1993) C3-75-C3-82
The thermodynamic properties of tetraethoxysilane (TEOS) and an infrared study of its thermal decompositionM.G.M. VAN DER VIS, E.H.P. CORDFUNKE and R.J.M. KONINGS
Netherlands Energy Research Foundation ECN, P.O. Box 1, 1755 ZG Petten, The Netherlands
A review is given on the determination of the thermodynamic properties of Si(OC2H5)4 (TEOS, tetraethoxysilane). In addition, the thermal decomposition of TEOS has been studied by in-situ IR spectroscopy. The decomposition products in the gas phase in the absence of oxygen are organic fragments (ethanol, ethanal, ethene, methane, carbon monoxide), and in the presence of oxygen water, carbon dioxide, ethanal and methanal. The results are compared with thermodynamic equilibrium calculations and kinetic models.
© EDP Sciences 1993