J. Phys. IV France 03 (1993) C3-83-C3-90
Heat transfer studies in cold CVD reactors using holographic interferometryH. CHEHOUANI1, S. BENET1, S. BRUNET1 and B. ARMAS2
1 LPA, Université de Perpignan, 66860 Perpignan, France
2 IMP/CNRS, BP. 5, 66120 Odeillo, France
The evaluation of holographic interferograms has been reviewed to perform quasi-real time and more accurate measurements of temperature fields within CVD reactors. In this way a powerful image processing device has been annexed to our optical arrangement to perform suitable and fast data acquisition. The evaluation of holographic interferograms is achieved using Fast Fourier Transform algorithm. Temperature fields have been measured within a large cold wall CVD reactor for different cylindrical substrate diameters and also for a conic substrate. We present some useful empirical correlations between Nusselt and Rayleigh numbers. Our aim in this paper is to give some useful experimental data which could be used to improve the validity of mathematical models developed for CVD process.
© EDP Sciences 1993