J. Phys. IV France
Volume 132, March 2006
Page(s) 195 - 198
Publié en ligne 11 mars 2006
10th International Conference on the Formation of Semiconductor Interfaces
C. Girardeaux, et al.
J. Phys. IV France 132 (2006) 195-198

DOI: 10.1051/jp4:2006132037

Alkylation of Silicon(111) surfaces

S. Rivillon and Y.J. Chabal

Department of Chemistry and Biomedical Engineering, Laboratory for Surface Modification, 136 Frelinghuysen Road, Piscataway, NJ 08854-8019, USA

Methylation of chlorine-terminated silicon (111) (Si-Cl) is investigated by Infra Red Absorption Spectroscopy (IRAS). Starting from an atomically flat H-terminated Si(111), the surface is first chlorinated by a gas phase process, then methylated using a Grignard reagent. Methyl groups completely replace Cl, and are oriented normal to the surface. The surface remains atomically flat with no evidence of etching.

© EDP Sciences 2006