Journal de Physique IV

Thirteenth European Conference on Chemical Vapor Deposition

J. Phys. IV France 11 (2001) Pr3-155-Pr3-161
DOI: 10.1051/jp4:2001319

Kinetics of LPCVD of aluminium nitride films based on pyrolysis of aluminium chloride complex

S.E. Alexandrov and V.A. Chistiakov

Department of Electronic Materials Technology, St. Petersburg State Technical University, Polytechnical Str. 29, St Petersburg 195251, Russia

Abstract
The main purpose of this paper is to summarise the results of an experimental study of the LPCVD kinetics of aluminium nitride films based on the pyrolysis of the aluminium chloride complex with ammonia, AlCl₃NH₃. The conclusions drawn are supported by the results of mass-spectrometry of the gas phase reactants.