J. Phys. IV France 11 (2001) Pr3-155-Pr3-161
Kinetics of LPCVD of aluminium nitride films based on pyrolysis of aluminium chloride complexS.E. Alexandrov and V.A. Chistiakov
Department of Electronic Materials Technology, St. Petersburg State Technical University, Polytechnical Str. 29, St Petersburg 195251, Russia
The main purpose of this paper is to summarise the results of an experimental study of the LPCVD kinetics of aluminium nitride films based on the pyrolysis of the aluminium chloride complex with ammonia, AlCl3NH3. The conclusions drawn are supported by the results of mass-spectrometry of the gas phase reactants.
© EDP Sciences 2001