J. Phys. IV France
Volume 08, Numéro PR9, December 1998
2nd European Meeting on Integrated Ferroelectrics
Page(s) Pr9-161 - Pr9-169
2nd European Meeting on Integrated Ferroelectrics

J. Phys. IV France 08 (1998) Pr9-161-Pr9-169

DOI: 10.1051/jp4:1998929

Report on Brite-EuRam Project Sensors and Mechatronic Devices using Ferroelectric Thin Films SEMDEFT

P.B. Kirby1, R.V. Wright1, P. Gaucher2, P. Galtier2, L. Kofoed3, J.O. Gulløv3, W. Von Munch4, D. Eichner4, B. Ploss5 and J.K. Kruger6

1  GEC-Marconi Infra-Red Limited, Caswell, Towcester, Northamptonshire NN12 8EQ, U.K.
2  Thomson CSF, Laboratoire Central de Recherches, Domaine de Corbeville, 91404 Orsay cedex, France
3  Bruel and Kjaer, 307 Skodsborgvej, 2850 Nærum, Denmark
4  Universität Stuttgart, Institut für Halbleitertechnik, Pffaffenwaldring 47, 70550 Stuttgart, Germany
5  University of Karlsruhe, Applied Physics Department, P.O. Box 6980, Kaiserstrasse 12, 66123 Karlsruhe, Germany
6  University of Saarbrücken, Experimentalphysik 10.2, Bau 38, 66123 Saarbrücken, Germany

This report describes work carried out over 42 months under a Brite-EuRam project concerned with developing technologies to make use of the piezoelectric and pyroelectric properties of ferroelectric thin films on silicon microstructures, with the aim of addressing the burgeoning need for miniature sensors. To achieve this advances were made in ferroelectric thin film deposition technologies, ferroelectric materials characterisation, silicon micromachining technologies, ferroelectric processing techniques, modelling of ferroelectric devices and fabrication methods for piezoelectric and pyroelectric devices. The outcome of fabricating hoth piezoelectric and pyroelectric ferroelectric microstructures will be described.

© EDP Sciences 1998