| Numéro |
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
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|
|---|---|---|
| Page(s) | C3-375 - C3-378 | |
| DOI | https://doi.org/10.1051/jp4:1993351 | |
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
J. Phys. IV France 03 (1993) C3-375-C3-378
DOI: 10.1051/jp4:1993351
Department of Chemistry, Moscow State University, Moscow V-234, 119899, Russia
© EDP Sciences 1993
J. Phys. IV France 03 (1993) C3-375-C3-378
DOI: 10.1051/jp4:1993351
New principle of feeding for flash evaporation MOCVD devices
A.R. KAUL and B.V. SELEZNEVDepartment of Chemistry, Moscow State University, Moscow V-234, 119899, Russia
Abstract
A novel scheme of flash evaporation feeding for MOCVD processes of multicomponent oxide films deposition is proposed. The scheme comprises 1) microdozage of organic solution of solid volatile precursors on the glass fiber belt, 2) evaporation of the solvent and 3) flash evaporation of MOC microdoses from the belt. The functioning of the designed feeder is described and the features of proposed scheme in comparison to existing feeding principles are discussed.
© EDP Sciences 1993