J. Phys. IV France 03 (1993) C3-375-C3-378
New principle of feeding for flash evaporation MOCVD devicesA.R. KAUL and B.V. SELEZNEV
Department of Chemistry, Moscow State University, Moscow V-234, 119899, Russia
A novel scheme of flash evaporation feeding for MOCVD processes of multicomponent oxide films deposition is proposed. The scheme comprises 1) microdozage of organic solution of solid volatile precursors on the glass fiber belt, 2) evaporation of the solvent and 3) flash evaporation of MOC microdoses from the belt. The functioning of the designed feeder is described and the features of proposed scheme in comparison to existing feeding principles are discussed.
© EDP Sciences 1993