| Numéro |
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
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| Page(s) | C2-593 - C2-599 | |
| DOI | https://doi.org/10.1051/jp4:1991271 | |
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
J. Phys. IV France 02 (1991) C2-593-C2-599
DOI: 10.1051/jp4:1991271
1 Netherlands Energy Research Foundation ECN, Westerduinweg 3, P.O. Box 1, NL-1755 ZG Petten, The Netherlands
2 Delft University of Technology, Laboratory for Inorganic Chemistry, Julianalaan 136, NL-2628 BL, The Netherlands
© EDP Sciences 1991
J. Phys. IV France 02 (1991) C2-593-C2-599
DOI: 10.1051/jp4:1991271
CHEMICAL VAPOR PRECIPITATION OF SUBMICRON TITANIUM NITRIDE POWDER
J.P. DEKKER1, P.J. VAN DER PUT2, R.R. NIEUWENHUIS2, H.J. VERINGA1 and J. SCHOONMAN21 Netherlands Energy Research Foundation ECN, Westerduinweg 3, P.O. Box 1, NL-1755 ZG Petten, The Netherlands
2 Delft University of Technology, Laboratory for Inorganic Chemistry, Julianalaan 136, NL-2628 BL, The Netherlands
Abstract
The synthesis of submicron titanium nitride powder by Chemical Vapor Precipitation and the characteristics of primary particles are presented. The properties of the powder formed are of prime importance to the Particle Precipitation aided Chemical Vapor Deposition process. The dependence of the particle size on the synthesis parameters and the differences in powder characteristics are discussed.
© EDP Sciences 1991