J. Phys. IV France 02 (1991) C2-593-C2-599
CHEMICAL VAPOR PRECIPITATION OF SUBMICRON TITANIUM NITRIDE POWDERJ.P. DEKKER1, P.J. VAN DER PUT2, R.R. NIEUWENHUIS2, H.J. VERINGA1 and J. SCHOONMAN2
1 Netherlands Energy Research Foundation ECN, Westerduinweg 3, P.O. Box 1, NL-1755 ZG Petten, The Netherlands
2 Delft University of Technology, Laboratory for Inorganic Chemistry, Julianalaan 136, NL-2628 BL, The Netherlands
The synthesis of submicron titanium nitride powder by Chemical Vapor Precipitation and the characteristics of primary particles are presented. The properties of the powder formed are of prime importance to the Particle Precipitation aided Chemical Vapor Deposition process. The dependence of the particle size on the synthesis parameters and the differences in powder characteristics are discussed.
© EDP Sciences 1991