| Issue |
J. Phys. IV France
Volume 03, Number C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
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|---|---|---|
| Page(s) | C3-353 - C3-360 | |
| DOI | https://doi.org/10.1051/jp4:1993348 | |
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
J. Phys. IV France 03 (1993) C3-353-C3-360
DOI: 10.1051/jp4:1993348
Institut de Ciència de Materials de Barcelona, C.S.I.C., Campus UAB, 08193 Bellaterra, Spain
© EDP Sciences 1993
J. Phys. IV France 03 (1993) C3-353-C3-360
DOI: 10.1051/jp4:1993348
YBa2Cu3O7-x thin films deposition on YSZ substrates by MOCVD
J. SANTISO and A. FIGUERASInstitut de Ciència de Materials de Barcelona, C.S.I.C., Campus UAB, 08193 Bellaterra, Spain
Abstract
The evaporation process of β-diketonate precursors for the MOCVD deposition of YBa2Cu3O7-x superconducting films has been investigated by thermogravimetric analysis. Special attention has been paid to the Ba(thd)2 precursor. A simple model of the reactions involved in this process has been described. YBa2Cu3O7-x superconducting layes were deposited on YSZ substrates by MOCVD in a horizontal hot-wall reactor. Films showed a mixture of c-axis and a-axis orientation and have a Tc(R=0)=88.2K and Tc onset=91.6K
© EDP Sciences 1993