| Numéro |
J. Phys. IV France
Volume 11, Numéro PR11, Décembre 2001
International Conference on Thin Film Deposition of Oxide Multilayers Hybrid Structures
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| Page(s) | Pr11-115 - Pr11-119 | |
| DOI | https://doi.org/10.1051/jp4:20011118 | |
International Conference on Thin Film Deposition of Oxide Multilayers Hybrid Structures
J. Phys. IV France 11 (2001) Pr11-115-Pr11-119
DOI: 10.1051/jp4:20011118
LAIMAN, ESIA, Université de Savoie, BP. 806, 74016 Annecy, France
© EDP Sciences 2001
J. Phys. IV France 11 (2001) Pr11-115-Pr11-119
DOI: 10.1051/jp4:20011118
Preparation and characterization of Au/ZrO2 composite obtained by oxidation of thin film ZrxAuy alloy
N. Sanz, M. Lomello-Tafin and Ph. GalezLAIMAN, ESIA, Université de Savoie, BP. 806, 74016 Annecy, France
Abstract
We present the preliminary results of a study aiming at preparing Au/ZrO2 mixed nanosized particles from thin films. In a first step, pure Zr and Au layers are alternatively deposited by RF sputtering on Si and W substrates under vacuum. Then, the intermetallic compounds are formed at high temperature under an inert atmosphere or in vacuum. The resulting samples are characterized by X-ray diffraction and by scanning electron microscopy.
Keywords : Intermetallic compounds, Gold nanoparticles, Thin films, Gas sensors
© EDP Sciences 2001