Numéro |
J. Phys. IV France
Volume 09, Numéro PR8, September 1999
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
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Page(s) | Pr8-909 - Pr8-914 | |
DOI | https://doi.org/10.1051/jp4:19998114 |
J. Phys. IV France 09 (1999) Pr8-909-Pr8-914
DOI: 10.1051/jp4:19998114
Properties of multicomponent layers produced on high speed steel by combined nitriding and PACVD methods under glow discharge conditions
J.R. Sobiecki1, S.K. Kim2, T. Wierzchon1 and J. Trojanowski31 Faculty of Materials Science and Engineering, Warsaw University of Technology, 02-524 Warsaw, Narbutta 85, Poland
2 School of Materials Science and Engineering, University of Ulsan, Ulsan, Kyung Nam 680-749, Korea
3 Institute of Precision Mechanics, 00-967 Warsaw, Duchnicka 3, Poland
Abstract
A prospective line in the development of thermo-chemical treatments under glow discharge conditions is to work out new techniques of producing multicomponent layers such as e.g. combined plasma nitriding and PACVD technique with the use of organic compounds. These layers permit widening the application range of treated parts since they improve their useful properties. The paper specifies the conditions under which the composite layers of the nitrided + Ti(NCO) type can be produced on high speed steel using a gaseous atmosphere of the organic titanium compound Ti(OC3H7)4 nitrogen and hydrogen and discusses the influence of the carbon and oxygen contents in the Ti(NxCyOz layer on its properties such as hardness and wear resistance. The composite layers of the nitrided + Ti(NCO) type have a good resistance to frictional wear. The chemical composition of these layers can be controlled. This new processes can be performed during a sole technological operation in a conventional equipment designed for glow discharge assisted techniques.
© EDP Sciences 1999