Numéro
J. Phys. IV France
Volume 05, Numéro C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
Page(s) C5-699 - C5-703
DOI https://doi.org/10.1051/jphyscol:1995584
Proceedings of the Tenth European Conference on Chemical Vapour Deposition

J. Phys. IV France 05 (1995) C5-699-C5-703

DOI: 10.1051/jphyscol:1995584

Properties of Surface Layers Produced from a Metalorganic Titanium Compound Under Glow Discharge Conditions

T. Wierzchon and J.R. Sobiecki

Department of Materials Science and Engineering, Warsaw University of Technology, 02-524 Warsaw, Narbutta 85, Poland


Abstract
A prospective line in the development of thermo-chemical treatments under glow discharge conditions is to work out new techniques of producing multicomponent layers, e.g., composite layers, by combining various treatments, such as e.g. plasma nitriding and the PACVD method. The combined properties, appropriately selected and complementary to one another, of the single-component layers obtained using one of these processes, permit widening the application range of the layers. The paper specifies the conditions under which the multicomponent layers of Ti(OCN) type and composite layers of the nitrided + TiN or nitrided + Ti(OCN) type can be produced on steel. The structure and properties of the layers thus obtained are also described.



© EDP Sciences 1995