Second harmonic modulated photo-reflectance imaging of integrated circuits

Z.-L. Qian; S.-Y . Zhang; Y.-S. Lu; J. He; M. Tao

doi:doi:10.1051/jp4:1994749

Numéro		J. Phys. IV France Volume 04, Numéro C7, Juillet 1994 8th International Topical Meeting on Photoacoustic and Photothermal Phenomena 8 ITMP³ / 8éme conférence internationale de photoacoustique et photothermique


Page(s)		C7-203 - C7-206
DOI		https://doi.org/10.1051/jp4:1994749

8th International Topical Meeting on Photoacoustic and Photothermal Phenomena
8 ITMP³ / 8éme conférence internationale de photoacoustique et photothermique

J. Phys. IV France 04 (1994) C7-203-C7-206
DOI: 10.1051/jp4:1994749

Second harmonic modulated photo-reflectance imaging of integrated circuits

Z.-L. Qian, S.-Y . Zhang, Y.-S. Lu, J. He and M. Tao

Institute of Acoustics and Lab. of Modern Acoustics, Nanjing University, Nanjing 210093, China

Abstract
The second harmonic imaging of the modulated photoreflectance (MPR) signals of integrated circuits has been obtained. The second harmonic imaging has special NDE capability for some surface and subsurface structures of semiconductor devices, particularly for the ion implantation process, based on the distinctive mechanism of the nonlinear MPR effect.