J. Phys. IV France 02 (1991) C2-505-C2-505
HIGH QUALITY OXIDES FOR LARGE AREA DISPLAYSL.M. JOHNSON, M. SAUNDERS and D.B. MEAKIN
Leybold AG, Siemensstrasse 100, D-8755 Alzenau, Germany
Great interest has been shown over recent years in the development of large area polysilicon active matrix displays. Availability of a reliable process for gate oxide formation over large area has proved a major barrier, despite significant advances in similar wager processing systems. A system has been developed for deposition of low temperature oxides on large area (up to 14x14 inches) glass substrates. The characteristics of the deposited films have been studied and the suitability of the process and equipment for large area displays will be demonstrated.
© EDP Sciences 1991