J. Phys. IV France 02 (1991) C2-509-C2-537
CHEMICAL VAPOUR DEPOSITON - A REVIEW OF 25 YEARS EXPERIENCEE. FITZER
Institut fuer Chemische Technik der Universitaet Karlsruhe, Kaiserstrasse 12, D-7500 Karlsruhe 1, Germany
This paper describes studies of CVD processes of technical relevance, in which some unusual and unexpected phenomena have been observed. It offers, furthermore, explanations, solutions to problems, and ways of mathematical modelling. At the start, reaction and diffusion layers on iron and on molybdenum are considered. Because of overlapping metallurgical difficulties, the further studies are restricted to CVD overlay coatings. The "aluminizing" of the cooling channels in turbine blades made of Ni based superalloys by the subchloride process and MoSi2 deposition on refractory alloys with diffusion barriers are described.
© EDP Sciences 1991