J. Phys. IV France 02 (1991) C2-497-C2-503
PROPERTIES AND PRACTICAL RESULTS OF TUNGSTEN CARBIDE COATING PRODUCED BY LOW TEMPERATURE CVD PROCESSS. ICHIJO1, K. TAMURA1, T. TAKANO1, A. NAKAO1 and T. HIRAHARA2
1 Tokyo Advanced Technologies CO., LTD., 5-3-38 Ujina-higashi, Minami-ku, Hiroshima 734, Japan
2 Tokyo Hard Coat CO., LTD., 1450-27 Aza-matsubara, Oaza-uenodai, Hukaya, Saitama 366, Japan
In forming tungsten carbide layer by low temperature and vacuum CVD, uniformity of film thickness, adhesion and gloss achieved when the effective zone of coating set is increased to ∅450 × 1,100 mm is described. Characteristics of tungsten carbide layer are evaluated and compared with other materials. Some practical applications to the mechanical parts of plastic injection molding machines are introduced.
© EDP Sciences 1991