J. Phys. IV France
Volume 125, June 2005
|Page(s)||459 - 463|
J. Phys. IV France 125 (2005) 459-463
Photothermal dynamic elastic bending in microcantileverD.M. Todorovic and A. Bojicic
Center for Multidisciplinary Studies, University of Belgrade, Belgrade, Serbia & Montenegro
Dynamic thermoelastic and electronic deformation bending in an uncoated and a coated rectangular microcantilever are investigated. The theoretical model for the dynamic elastic vibrations of the uncoated and coated microcantilevers, including the thermoelastic and electronic deformation effects are analyzed. The components of elastic bending of microcantilevers, with dimensions typical for atomic force microscopy are calculated. These investigations are important for atomic force microscopy and many sensors and actuators based on microcantilevers.
© EDP Sciences 2005