Photothermal dynamic elastic bending in microcantilever

Abstract
Dynamic thermoelastic and electronic deformation bending in an uncoated and a coated rectangular microcantilever are investigated. The theoretical model for the dynamic elastic vibrations of the uncoated and coated microcantilevers, including the thermoelastic and electronic deformation effects are analyzed. The components of elastic bending of microcantilevers, with dimensions typical for atomic force microscopy are calculated. These investigations are important for atomic force microscopy and many sensors and actuators based on microcantilevers.