| Numéro |
J. Phys. IV France
Volume 104, March 2003
|
|
|---|---|---|
| Page(s) | 141 - 143 | |
| DOI | https://doi.org/10.1051/jp4:200300048 | |
J. Phys. IV France 104 (2003) 141
DOI: 10.1051/jp4:200300048
Development of soft X-ray microscopy System using X-ray laser in JAERI Kansai
M. Kishimoto1, M. Tanaka1, R. Tai1, K. Sukegawa1, M. Kado1, N. Hasegawa1, H. Tang1, T. Kawachi1, P. Lu1, K. Nagashima1, H. Daido1, Y. Kato1, K. Nagai2 and H. Takenaka21 Kansai Research Establishment, Japan Atomic Energy Research Institute, 8-1 Umemidai, Kizu-cho, Souraku-gun, Kyoto 619-0215, Japan
2 NTT Advanced Technology Corporation, 162 Shirakata, Tokai, Naka, Ibaraki 319-1193, Japan
Abstract
A picosecond time-resolved soft X-ray microscopy System using an X-ray laser has been
developed. A 13.9 nm coherent X-ray laser is generated by means of a ps CPA glass laser System. The pulse
duration and the number of photons of the X-ray laser are about 7 ps and 10
12 photons/pulse, respectively.
The X-ray laser pulse is condensed with a Schwarzschild optics and illuminated onto the sample. The
transmitted X-ray image is magnified with a zone plate. X-ray images of a Cu mesh and a zone plate with
spatial resolution of about 200 nm has been obtained by a single shot of ps X-ray laser.
© EDP Sciences 2003