A scanning photoelectron microscope for materials science spectromicroscopy at the Pohang Light Source

H.J. Shin; M.K. Lee; G.B. Kim; C.K. Hong; J.Y. Lee; J.W. Kim; S.M. Park; Y.S. Roh; K. Jeong

doi:doi:10.1051/jp4:200300031

Numéro		J. Phys. IV France Volume 104, March 2003


Page(s)		67 - 70
DOI		https://doi.org/10.1051/jp4:200300031

J. Phys. IV France 104 (2003) 67
DOI: 10.1051/jp4:200300031

A scanning photoelectron microscope for materials science spectromicroscopy at the Pohang Light Source

H.J. Shin^{1, 2}, M.K. Lee¹, G.B. Kim², C.K. Hong², J.Y. Lee³, J.W. Kim³, S.M. Park³, Y.S. Roh⁴ and K. Jeong⁴

¹ Pohang Accelerator Laboratory, Pohang University of Science and Technology (POSTECH), Pohang, Korea
² Department of Physics, POSTECH, Pohang, Korea
³ Department of Chemistry and Center for Integrated Molecular Systems and School of Environmental Science and Engineering, POSTECH, Pohang, Korea
⁴ Department of Physics, Yonsei University, Seoul, Korea

Abstract
A Fresnel zone plate based SPEM (scanning photoelectron microscope) is in operation at the Pohang Light Source. Space resolution of the SPEM is typically, $\lesssim$ 1 $\mu$ m (0.4 $\mu$ m in the best resolution) and the photon flux at the focused spot is ~10 ⁹ photons/s. The SPEM is working in the energy range between 400 and 1,000 eV. In taking images and spectra, the SPEM detects photoelectrons from the focused spot using a hemispherical analyzer with 16-channel detection capability at energy resolution of ~0.5 eV. The SPEM also measures sample current, with which comparative x-ray absorption micro-spectroscopy is available in limited energy range with spectral resolving power (E/ $\Delta$ E) of ~3,000. The advantage of detecting sample current image and x-ray absorption spectrum at the Fe L $_{\rm lll}$ ,-edge is demonstrated for understanding the effect of electrochemically deposited Zn layer on Fe substrate.