| Numéro |
J. Phys. IV France
Volume 12, Numéro 3, May 2002
|
|
|---|---|---|
| Page(s) | 179 - 181 | |
| DOI | https://doi.org/10.1051/jp420020063 | |
J. Phys. IV France 12 (2002) Pr3-179
DOI: 10.1051/jp420020063
Integrated niobium thin film air bridges as variable capacitors for GHz tuning circuits
M. Schicke and K.-F. SchusterInstitut de Radio Astronomie Millimétrique, IRAM, 300 rue de la Piscine, 38406 Saint-Martin-d'Hères, France
Abstract
Superconducting GHz electronics can be improved by variable tuning circuits. We present a low temperature (
<150°C) process for the fabrication of niobium (Nb) thin film air bridges as variable capacitors, which can be integrated in
Nb superconducting electronics. These elements can be applied for on-chip adjustment of filters, resonators and tuning circuits.
Measurements and calculations of the electrostatic actuation of the bridges will be compared.
© EDP Sciences 2002