| Numéro |
J. Phys. IV France
Volume 11, Numéro PR11, Décembre 2001
International Conference on Thin Film Deposition of Oxide Multilayers Hybrid Structures
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| Page(s) | Pr11-221 - Pr11-225 | |
| DOI | https://doi.org/10.1051/jp4:20011136 | |
International Conference on Thin Film Deposition of Oxide Multilayers Hybrid Structures
J. Phys. IV France 11 (2001) Pr11-221-Pr11-225
DOI: 10.1051/jp4:20011136
1 Vilnius University, Department of General and Inorganic Chemistry, Naugarduko 24, 2006 Vilnius, Lithuania
2 Semiconductor Physics Institute, A. Gostauto 11, 2600 Vilnius, Lithuania
3 Vilnius University, Department of General and lnorganic Chemistry, Naugarduko 24, 2006 Vilnius, Lithuania
4 LMGP, ENS de Physique de Grenoble, INPG, UMR 5628 du CNRS, Saint-Martin-d'Hères, France
© EDP Sciences 2001
J. Phys. IV France 11 (2001) Pr11-221-Pr11-225
DOI: 10.1051/jp4:20011136
Pulsed injection MOCVD of heteroepitaxial multilayers of perovskite oxides
A. Abrutis1, V. Plausinaitiene1, 2, A. Teiserskis3, Z. Saltyte3, V. Kubilius3, B. Vengalis2, L. Dapkus2 and J.P. Sénateur41 Vilnius University, Department of General and Inorganic Chemistry, Naugarduko 24, 2006 Vilnius, Lithuania
2 Semiconductor Physics Institute, A. Gostauto 11, 2600 Vilnius, Lithuania
3 Vilnius University, Department of General and lnorganic Chemistry, Naugarduko 24, 2006 Vilnius, Lithuania
4 LMGP, ENS de Physique de Grenoble, INPG, UMR 5628 du CNRS, Saint-Martin-d'Hères, France
Abstract
The single liquid source pulsed injection MOCVD technique was used to deposit high quality heteroepitaxial structures containing YBa2Cu3O7-x(YBCO), SrTiO3 (STO) and La1-xSrxMnO3 (LSMO) layers. Y, Cu, Sr, La, Mn thd complexes (thd-2,2,6,6-tetramethylheptane-3,5-dionate), Ba(thd)2(phen)2 (phen-1,l0-phenanthroline) and Ti(i-OPr)2(thd)2 or Ti(i-OEt)2(thd)2 were used as precursor materials and monoglyme (1,2- dimethoxyethane) as a solvent. The deposition of heterostructures was performed in situ or ex situ in a hot wall vertical MOCVD reactor. Various heteroepitaxial structures (STO/LSMO, LSMO/STO/LSMO, STO/YBCO, LSMO/YBCO, STO/LSMO/YBCO, LSMO/STO/YBCO, STO/LSMO/STO/YBCO) were gown and studied.
© EDP Sciences 2001