J. Phys. IV France
Volume 11, Numéro PR11, Décembre 2001International Conference on Thin Film Deposition of Oxide Multilayers Hybrid Structures
|Page(s)||Pr11-109 - Pr11-113|
J. Phys. IV France 11 (2001) Pr11-109-Pr11-113
YBCO coated conductors by reactive thermal co-evaporationU. Schmatz, Ch. Hoffmann, M. Bauer, R. Metzger, P. Berberich and H. Kinder
Physikdepartment E10, TU München, 85747 Garching, Germany
Coated tape conductors of YBCO require a deposition process allowing to obtain a high volume growth rate in order to produce long lengths of tape in a reasonable amount of time. We present our tape coating system where 15 parallel loops of travelling tape of 1 cm width can be coated simultaneously by reactive thermal co-evaporation. For high critical current densities, in-plane alignment of the YBCO film is necessary. Inclined substrate deposition (ISD) is a technique that allows to deposit in-plane oriented buffer layers suitable for YBCO growth at high deposition rates.We present results obtained for YBCO films grown on MgO-ISD buffer layers deposited by e-gun evaporation onto metallic tape substrates.
© EDP Sciences 2001