| Numéro |
J. Phys. IV France
Volume 11, Numéro PR3, Août 2001
Thirteenth European Conference on Chemical Vapor Deposition
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|---|---|---|
| Page(s) | Pr3-357 - Pr3-362 | |
| DOI | https://doi.org/10.1051/jp4:2001345 | |
Thirteenth European Conference on Chemical Vapor Deposition
J. Phys. IV France 11 (2001) Pr3-357-Pr3-362
DOI: 10.1051/jp4:2001345
1 Plasma Technology Laboratory, Department of Chemical Engineering, University of Patras, P.O. Box 1407, 26500 Patras, Greece
2 Plasma Processing Laboratory, ENSCP, Université Paris VI, 11 rue Pierre et Marie Curie, 75231 Paris cedex 05, France
© EDP Sciences 2001
J. Phys. IV France 11 (2001) Pr3-357-Pr3-362
DOI: 10.1051/jp4:2001345
Treatment of polyethylene terephthalate in a He glow discharge
D.D. Papakonstantinou1, D. Mataras1 and Arefi-Khonsari21 Plasma Technology Laboratory, Department of Chemical Engineering, University of Patras, P.O. Box 1407, 26500 Patras, Greece
2 Plasma Processing Laboratory, ENSCP, Université Paris VI, 11 rue Pierre et Marie Curie, 75231 Paris cedex 05, France
Abstract
This work is focused on the study of electrical and optical properties of a helium glow discharge during the treatment of polyethylene terephthalate films for the modification of their surface properties. The experimental results reveal that the change of the polymer surface properties, due to the bombardment by energetic plasma species, is accompanied by a profound change of the electrical characteristics of the discharge and a spatially uniform quenching of certain emitting metastable species. The threshold-like evolution of these phenomena with increasing rf voltage indicates that they are likely to be attributed to ions accelerated in the polymer-covered electrode sheath.
© EDP Sciences 2001