J. Phys. IV France
Volume 11, Numéro PR3, Août 2001Thirteenth European Conference on Chemical Vapor Deposition
|Page(s)||Pr3-1117 - Pr3-1123|
J. Phys. IV France 11 (2001) Pr3-1117-Pr3-1123
Spouted bed metallorganic chemical vapor deposition of ruthenium on NiCoCrAlYTa powdersF. Juarez, A. Castillo, B. Pieraggi and C. Vahlas
Centre Interuniversitaire de Recherche et d'Ingénierie des Matériaux, CNRS-INPT-UPS, École Nationale Supérieure des Ingénieurs en Arts Chimiques et Technologiques, 118 route de Narbonne, 31077 Toulouse cedex 4, France
This paper reports on the spouted bed metallorganic chemical vapor deposition (SBMOCVD) of ruthenium on NiCoCrAlYTa commercial powders. The aim is to propose an economic, versatile and time saving process for the screening of the doping by platinum group elements of thermal barrier coatings applied on gas turbine engine blades, in order to improve their oxidation and corrosion resistance. Information on the spouting of the NiCoCrAlYTa powders and on the SBMOCVD reactor is provided in the first part of the paper. Following, two deposition routes for the CVD of ruthenium starting form ruthenocene are described. The first implies high temperature reaction with hydrogen and yields crystalline Ru nanoparticles on the surface of the powders. The second is a low temperature reaction with oxygen. It yields ruthenium oxide which in turn is reduced in situ to yield amorphous Ru. Both processes lead to uniform doping of the powders.
© EDP Sciences 2001