Thirteenth European Conference on Chemical Vapor Deposition

J. Phys. IV France 11 (2001) Pr3-1087-Pr3-1094
DOI: 10.1051/jp4:20013136

Single source MOCVD system for deposition of superconducting films onto moved tapes

O. Stadel¹, J. Schmidt¹, N.V. Markov^{1, 2}, S.V. Samoilenkov¹, G. Wahl¹, C. Jimenez³, F. Weiss³, D. Selbmann⁴, J. Eickemeyer⁴, O.Yu. Gorbenko², A.R. Kaul² and A. Abrutis<sup>5

1</sup>  Institut für Oberflächentechnik und Plasmatechnische Werkstoffentwicklung (IOPW), Technische Universität Braunschweig, Braunschweig, Germany
²  Department of Chemistry, Moscow State University (MSU), Moscow, Russia
³  Laboratoire des Matériaux et du Génie Physique (LMGP), ENSPG, Grenoble, France
⁴  Institut für Festkörper und Werkstofforschung Dresden (IFW), Dresden, Germany
⁵  Vilnius University, Lithuania

Abstract
A new single source MOCVD-system was developed, which can be used to coat continuously textured Nickel tapes. To test the YBCO deposition single crystals and IBAD buffered substrates were continuously transported with 4 m/h through the deposition zone. The critical current density of the superconducting layers at 77 K is higher than 4 MA/cm² on single crystalline LaAlO₃ and higher than 2 MA/cm² on IBAD buffered tapes. Two routes for the buffer layer deposition on Ni are chosen : a) NiO is epitaxially grown onto textured Ni by thermal oxidation. b) In reducing atmosphere textured buffer layers were deposited onto nickel.

© EDP Sciences 2001