J. Phys. IV France
Volume 08, Numéro PR9, December 19982nd European Meeting on Integrated Ferroelectrics
|Page(s)||Pr9-195 - Pr9-198|
J. Phys. IV France 08 (1998) Pr9-195-Pr9-198
Calcium modified lead titanate thin films for electromechanical applicationsA.L. Kholkin1, 2 and M.L. Calzada3
1 Laboratoire de Céramique, EPFL, 1015 Lausanne, Switzerland
2 Department of Ceramic and Materials Engineering, Rutgers University, Piscataway, NJ 08854-8065, U.S.A.
3 Departamento de Materiales Ferroelectricos, ICMM CSIC, 28049 Madrid, Spain
Electromechanical properties of Pbl-xCaxTiO3 (PCT) thin films prepared by sol-gel technique are investigated as a function of Ca content. Crystallization of a perovskite phase is observed for the films subjected to the rapid thermal anneal at 650 °C. A small amount of pyrochlore phase is found for low Ca concentration (x=0.08). Tetragonality of the films is gradually decreased with Ca addition in qualitative agreement with bulk ceramics data. Piezoelectric coefficient, d33, measured by optical interferometry initially increases with Ca content reaching a maximum at x=0.24. At this concentration, d33 of 70 pm/V is observed which matches well the value for bulk PCT ceramics. The strain developed at 400 kV/cm is progressively decreased with Ca reflecting a decrease in tetragonality of the films. The observed difference in piezoelectric coefficients of PCT films and bulk ceramics is qualitatively explained by the clamping effect of the substrate and by depoling of the films due to the influence of depolarizing field.
© EDP Sciences 1998