J. Phys. IV France
Volume 08, Numéro PR9, December 19982nd European Meeting on Integrated Ferroelectrics
|Page(s)||Pr9-33 - Pr9-42|
J. Phys. IV France 08 (1998) Pr9-33-Pr9-42
Characterization method of the valence states : Application to dielectrics and metal-dielectrics interfacesP. Jonnard
Laboratoire de Chimie Physique - Matière et Rayonnement de l'Université Pierre et Marie Curie, UMR 7614 du CNRS, 11 rue Pierre et Marie Curie, 75231 Paris cedex 05, France
Electron-induced x-ray emission spectroscopy (EXES) is an efficient technique to study the physicochemical properties of thin films and of buried interfaces. This method analyzes the distribution of the valence states, i.e. the states sensitive to the environment, in a selective way with the depth. The selectivity comes from the use of ionizing particles (electrons) gradually loosing their energy in the matter. Then the incident electron energy can be chosen in order to probe a given thickness of the material under study. Relation between chemical bond and atomic structure is discussed in the case of bare dielectrics (Al2O3 and MgO). Applications to buried metal-dielectric interfaces (AuPd/Al2O3 and Cu/MgO) are discussed as a function of mechanical properties.
© EDP Sciences 1998