| Numéro |
J. Phys. IV France
Volume 08, Numéro PR7, October 1998
3rd International Workshop Microwave Discharges : Fundamentals and Applications
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|
|---|---|---|
| Page(s) | Pr7-21 - Pr7-32 | |
| DOI | https://doi.org/10.1051/jp4:1998702 | |
3rd International Workshop Microwave Discharges : Fundamentals and Applications
J. Phys. IV France 08 (1998) Pr7-21-Pr7-32
DOI: 10.1051/jp4:1998702
Laboratoire de Physique des Gaz et des Plasmas, bâtiment 210, Université de Paris-Sud Orsay, 91405 Orsay cedex, France
© EDP Sciences 1998
J. Phys. IV France 08 (1998) Pr7-21-Pr7-32
DOI: 10.1051/jp4:1998702
Modeling of microwave reactors : microwave and kinetics in gas flow approaches
G. GoussetLaboratoire de Physique des Gaz et des Plasmas, bâtiment 210, Université de Paris-Sud Orsay, 91405 Orsay cedex, France
Abstract
The modeling of microwave plasma reactors must couple the external hf field to the kinetics of charged particles and neutral species in presence of a gas flow. Various approaches to solve the non-linear coupled equations which describe the physical situation, are proposed and discussed in this paper.
© EDP Sciences 1998