| Numéro |
J. Phys. IV France
Volume 07, Numéro C4, Octobre 1997
XXIIIrd ICPIGXXIIIrd International Conference on Phenomena in Ionized gases |
|
|---|---|---|
| Page(s) | C4-235 - C4-246 | |
| DOI | https://doi.org/10.1051/jp4:1997419 | |
EUROPEAN SYMPOSIUM ON MARTENSITIC TRANSFORMATION AND SHAPE MEMORY PROPERTIES
J. Phys. IV France 07 (1997) C4-235-C4-246
DOI: 10.1051/jp4:1997419
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816, Japan
© EDP Sciences 1997
J. Phys. IV France 07 (1997) C4-235-C4-246
DOI: 10.1051/jp4:1997419
Production of Large Diameter ECR Plasma
Y. Kawai and Y. UedaInterdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816, Japan
Abstract
The production of a large diameter ECR plasma with microwaves of frequency 2.45 GHz is reviewed, including our experimental results with a multi-slot antenna and a TE01 mode microwave converter. It is pointed out that the electromagnetic waves play an important role in plasma uniformity as well as plasma production. Furthermore, it is found that the X wave contributes to plasma uniformity for electron density of (1-2)x1017m-3 which almost corresponds to the L cutoff.
© EDP Sciences 1997