J. Phys. IV France
Volume 05, Numéro C5, Juin 1995Proceedings of the Tenth European Conference on Chemical Vapour Deposition
|Page(s)||C5-547 - C5-551|
J. Phys. IV France 05 (1995) C5-547-C5-551
Volatile Metals Coordination Compounds as Precursors for Functional Materials Synthesis by CVD-MethodE.A. Mazurenko and A.I. Gerasimchuk
Institute of General and Inorganic Chemistry of National Academy of Sciences of Ukraine 32/34, Palladina prosp., Kiev-142, UA-252142, Ukraine
The applications of such coordination compounds (chelates) as metal β-diketonates in different CVD techniques were examined. It was shown that high chemical and physical characteristics of these compounds allow their favourable use comparatively with other volatile compounds. The general rules in volatility and thermal stability of β-diketonates and their fluorine derivatives were discussed. The ways of preparation of various functional materials with specific properties were determined.
© EDP Sciences 1995