Numéro |
J. Phys. IV France
Volume 05, Numéro C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
|
|
---|---|---|
Page(s) | C5-199 - C5-204 | |
DOI | https://doi.org/10.1051/jphyscol:1995522 |
J. Phys. IV France 05 (1995) C5-199-C5-204
DOI: 10.1051/jphyscol:1995522
Thermodynamics Aspects of Chemical Vapour Deposition of V-VII Group Metals and their Alloys with Tungsten
Y.V. LakhotkinInstitute of Physical Chemistry, Russian Academy of Sciences, Leninsky pr. 31, 117915, Moscow, Russia
Abstract
The composition of the gas and solid phases for the metal
(V, Nb, Ta, Mo, W, Re)-fluorine-hydrogen (Me-F-H) systems in the temperature
range 400-2000 K at pressures of 1.3x105 Pa and 2 kPa and for
fluoride to hydrogen ratios from 1:3 to 1:100 have been calculated using
complete basic data of thermochemical constants of the fluorides in different
valent and structural states. It was established that the moving forces
(supersaturation) of the metal crystallization in these systems decrease in the
following order : Re, W, Mo, Nb, Ta, V. Thermodynamics of tungsten solid
solutions in V, Nb, Ta, Mo and Re was considered in the frames of the
crystallization theory. It was shown that the temperature of tungsten
deposition from the Me-F-H systems in the CVD processes increases with the
addition of Re, W, Mo, V, Nb, Ta fluorides (in the order of
increment).
© EDP Sciences 1995