| Numéro |
J. Phys. IV France
Volume 03, Numéro C3, Août 1993
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
|
|
|---|---|---|
| Page(s) | C3-391 - C3-391 | |
| DOI | https://doi.org/10.1051/jp4:1993354 | |
Proceedings of the Ninth European Conference on Chemical Vapour Deposition
J. Phys. IV France 03 (1993) C3-391-C3-391
DOI: 10.1051/jp4:1993354
Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061, U.S.A
© EDP Sciences 1993
J. Phys. IV France 03 (1993) C3-391-C3-391
DOI: 10.1051/jp4:1993354
Optical filters by the pyrolysis of metal-organics
S.B. DESUDepartment of Materials Science and Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061, U.S.A
Abstract
Optical coatings and filters have enormous applications in every branch of modern optics. Traditionally optical films are deposited by evaporation, sputtering, and by chemical methods. Using these above mentioned techniques it is very difficult to obtain excellent quality films ; that is, films with extremely low values of scattering, absorption and film stress and high corrosion resistance to humidity. Recently developed Ion-Assisted Deposition techniques produce high performance films but suffer with high cost and their difficulty to coat odd shaped objects.
© EDP Sciences 1993