J. Phys. IV France
Volume 03, Numéro C3, Août 1993Proceedings of the Ninth European Conference on Chemical Vapour Deposition
|Page(s)||C3-281 - C3-284|
J. Phys. IV France 03 (1993) C3-281-C3-284
Growth studies of laser-induced CVD diamond filmsW. LUO, P. REN and Z. TAN
Center for Functional Materials Research, Qingdao Institute of Chemical Technology, Qingdao 266042, P.R. China
The growth of laser-induced chemical vapour deposition diamond thin films are studied. The X-ray diffraction (XRD) and electron diffraction analysis showed the structure of these film layers change from an amorphous to polycrystaline is obtained on scratched silicon substrate and at different growth conditions. The process of growth and structure of these films have been discussed.
© EDP Sciences 1993