| Numéro |
J. Phys. IV France
Volume 02, Numéro C1, Avril 1992
Deuxième Congrès Français d'Acoustique / Second French Conference on Acoustics
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|---|---|---|
| Page(s) | C1-361 - C1-364 | |
| DOI | https://doi.org/10.1051/jp4:1992177 | |
Deuxième Congrès Français d'Acoustique / Second French Conference on Acoustics
J. Phys. IV France 02 (1992) C1-361-C1-364
DOI: 10.1051/jp4:1992177
Laboratoire d'Acoustique, Associé au C.N.R.S. (U.R.A. 1101), Université du Maine, Avenue Olivier Messiaen, BP. 535, F-72017 Le Mans cedex, France
© EDP Sciences 1992
J. Phys. IV France 02 (1992) C1-361-C1-364
DOI: 10.1051/jp4:1992177
MODÉLISATION DES MICROPHONES MINIATURES : EFFETS DES COUCHES LIMITES VISCOTHERMIQUES
M. BRUNEAU, A.M. BRUNEAU and P. HAMERYLaboratoire d'Acoustique, Associé au C.N.R.S. (U.R.A. 1101), Université du Maine, Avenue Olivier Messiaen, BP. 535, F-72017 Le Mans cedex, France
Abstract
The purpose of this paper is to calculate the acoustic response of a stretched membrane separated from a rigid electrode by an air film whose thickness is the same order of magnitude as the viscous and thermal boundary layers (in the range of 1-10 µm), tacking into account the effect of a very small annular volume. The goal is to obtain an approximate model to describe the behavior of miniaturised condenser microphones designed on a silicon substrate, from the basic equations involving viscous, thermal, and acoustic effects.
© EDP Sciences 1992