J. Phys. IV France 02 (1992) C1-361-C1-364
MODÉLISATION DES MICROPHONES MINIATURES : EFFETS DES COUCHES LIMITES VISCOTHERMIQUESM. BRUNEAU, A.M. BRUNEAU and P. HAMERY
Laboratoire d'Acoustique, Associé au C.N.R.S. (U.R.A. 1101), Université du Maine, Avenue Olivier Messiaen, BP. 535, F-72017 Le Mans cedex, France
The purpose of this paper is to calculate the acoustic response of a stretched membrane separated from a rigid electrode by an air film whose thickness is the same order of magnitude as the viscous and thermal boundary layers (in the range of 1-10 µm), tacking into account the effect of a very small annular volume. The goal is to obtain an approximate model to describe the behavior of miniaturised condenser microphones designed on a silicon substrate, from the basic equations involving viscous, thermal, and acoustic effects.
© EDP Sciences 1992