| Numéro |
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
|
|
|---|---|---|
| Page(s) | C2-617 - C2-624 | |
| DOI | https://doi.org/10.1051/jp4:1991274 | |
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
J. Phys. IV France 02 (1991) C2-617-C2-624
DOI: 10.1051/jp4:1991274
1 Laboratory for Inorganic Chemistry, Delft University of Technology, Julianalaan 136, NL-2628 BL Delft, The Netherlands
2 C.L.O.E.S, E.S.S, University of Metz, 2 rue E. Balin, F-57078 Metz, France
© EDP Sciences 1991
J. Phys. IV France 02 (1991) C2-617-C2-624
DOI: 10.1051/jp4:1991274
DEPOSITION OF BORON NITRIDE BY PLASMA ENHANCED CVD USING BORANE AMINE
J.G.M. BECHT1, A. BATH2, E. HENGST1, P.J. VAN DER PUT1 and J. SCHOONMAN11 Laboratory for Inorganic Chemistry, Delft University of Technology, Julianalaan 136, NL-2628 BL Delft, The Netherlands
2 C.L.O.E.S, E.S.S, University of Metz, 2 rue E. Balin, F-57078 Metz, France
Abstract
BN has been deposited with plasma enhanced CVD using borane dimethyl amine and NH3. The resulting layers are stable in air, although they contain an excess of boron, the actual amount depending on the deposition conditions. The presence of relatively large amounts of carbon in the layers indicates the incomplete decomposition of the organic fragment. Generally the layers posses the turbostratic structure. Only when a large excess of NH3 is present in the gas phase does the cubic structure develop.
© EDP Sciences 1991