| Numéro |
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
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| Page(s) | C2-459 - C2-466 | |
| DOI | https://doi.org/10.1051/jp4:1991256 | |
J. Phys. IV France 02 (1991) C2-459-C2-466
DOI: 10.1051/jp4:1991256
USE OF THE HAZOP ANALYSIS FOR EVALUATION OF CVD REACTORS
W.W. CRAWFORD, J.R. ZUBER and W.R. KNOLLEAT [MATH] T Bell Laboratories, 555 Union Boulevard, Allentown, PA 18103, U.S.A.
Abstract
Before equipment is installed at AT&T Bell Laboratories, Allentown, a hazard and operability (HAZOP) analysis is done. Through a systematic process, a team leader guides a group of knowledgeable individuals through the equipment design to discover the hazards and the operating range of the equipment. During this HAZOP analysis, the equipment engineer responsible for the CVD process becomes aware of all aspects of the equipment from the electrical and chemical hookup of the process chamber to the treatment of the effluent. At our facility, HAZOP analysis has proven to be an effective tool. We present a sample HAZOP analysis for an MOCVD installation along with the short, easy-to-use questionnaire that the responsible engineer completes before the HAZOP analysis begins.
© EDP Sciences 1991