| Numéro |
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
|
|
|---|---|---|
| Page(s) | C2-175 - C2-182 | |
| DOI | https://doi.org/10.1051/jp4:1991221 | |
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
J. Phys. IV France 02 (1991) C2-175-C2-182
DOI: 10.1051/jp4:1991221
1 Institut de Science et de Génie des Matériaux et Procédés, CNRS, Odeillo, F-66120 Font Romeu, France
2 Laboratoire de Physique Appliquée, Université Perpignan, F-66860 Perpignan cedex, France
© EDP Sciences 1991
J. Phys. IV France 02 (1991) C2-175-C2-182
DOI: 10.1051/jp4:1991221
EXPERIMENTAL STUDY AND NUMERICAL SIMULATION OF HYDRODYNAMICS AND HEAT TRANSFER IN A COLD-WALL CVD REACTOR
H. CHEHOUANI1, B. ARMAS1, C. COMBESCURE1, S . BENET2 and S. BRUNET21 Institut de Science et de Génie des Matériaux et Procédés, CNRS, Odeillo, F-66120 Font Romeu, France
2 Laboratoire de Physique Appliquée, Université Perpignan, F-66860 Perpignan cedex, France
Abstract
A mathematical model including the NAVIER-STOKES and energy partial differential equations has been developed to predict the flow and temperature fields in a cold-wall CVD reactor. Particular attention is placed on understanding and explaining the influence of pressure on the hydrodynamics and heat transfer in the reactor. In order to validate the model predictions in the thermal aspect we used holographic interferometry to investigate the temperature gradients and to examine the thermal boundary layer thickness for several reactor inlet conditions. The comparison between the model predictions and experimental data shows good agreement.
© EDP Sciences 1991