Issue |
J. Phys. IV France
Volume 128, September 2005
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Page(s) | 71 - 76 | |
DOI | https://doi.org/10.1051/jp4:2005128011 |
J. Phys. IV France 128 (2005) 71-76
DOI: 10.1051/jp4:2005128011
CSD ceramic K(Ta,Nb)O3 thin films and their characterization by infrared spectroscopy
V. Zelezný1, J. Bursík2 and P. Vanek11 Institute of Physics ASCR, Praha, Czech Republic
2 Institute of Inorganic Chemistry ASCR, Rez, Czech Republic
Abstract
Potassium tantalate niobate
(KTaNb
O3, (KTN), where x = 0, 0.21, 0.36, 0.53, 0.74,
0.82, 0.86, and 1) thin films were prepared by chemical solution deposition
(CSD) on Si (100) substrates. A homogeneous and stable sol was obtained by
dissolving potassium, niobium and tantalum isobutoxides in absolute
isobutanol, refluxing for 30min and adding diethanolamine as a modifier. The
sol was deposited by spin coating. KTN perovskite films were successfully
prepared only on substrates covered with Al2O3 "chemical" and
KNbO3 seeding buffer layers, in other cases pyrochlore structure was
preferred. Annealing temperature and heating regime were also important
factors for film quality. The optimum final annealing temperature was
750
C/5min. It was confirmed by powder X-ray diffraction that the
prepared films have pseudocubic perovskite structure.


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