J. Phys. IV France
Volume 104, March 2003
Page(s) 591 - 594

J. Phys. IV France
104 (2003) 591
DOI: 10.1051/jp4:20030151

Phase-contrast hard X-ray microscope with a zone plate at the photon factory

H. Yokosuka1, N. Watanabe1, T. Ohigashi1, S. Aoki1 and M. Ando2

1  Institute ofApplied Physics, University of Tsukuba, Tennoudai 1-1-1, Tsukuba, Ibaraki, Japan
2  Institute of Material Structure Science, KEK, Oho 1-1, Tsukuba, Ibaraki, Japan

A Zernike-type phase-contrast X-ray microscope with a zone plate and a phase plate has been developed at the Photon Factory BL3C2. The zone plate had the outermost zone width of 0.1  $\mu$m and the diameter of t55  $\mu$m. Parallel monochromatic X-rays of 9 keV were incident on a specimen and a direct beam transmitted through the specimen was focused on the back focal plane of the zone plate where a phase plate was placed. Two types of phase plates were tested. One was an aluminum foil with a pinhole, and the other was a gold wire embeded in epoxy resin. Using the aluminum phase plate, a tantalum line pattern as fine as 0.2  $\mu$m could be imaged. Almost transparent specimens, such as polystyrene beads of 2.8  $\mu$m in diameter could be also observed. Using the gold phase plate, a tantalum line pattern as fine as 0.1  $\mu$m could be imaged.

© EDP Sciences 2003