Journal de Physique IV

J. Phys. IV France 104 (2003) 53
DOI: 10.1051/jp4:200300028

Full-field X-ray fluorescence microscope with a quasi-monochromatic beam

T. Ohigashi, N. Watanabe, H. Yokosuka and S. Aoki

Institute of Applied Physics, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba, Ibaraki 305-8573, Japan

Abstract
A full-field x-ray fluorescence microscope with a Wolter mirror (magnification : JO) was constructed at BL3C2 of the Photon Factory. A monochromator with a W/B ₄C multilayer mirror was equipped. The photon flux of $7.2\times 10^$ [photons/sec/mm] and the energy resolution of $\Delta E/E\approx 3.0\times 10^$ (on average) could be obtained. Elemental mappings of a test sample (Ti, Fe, Ni and Cu wires), a marble (Ca and Fe) and a synthesized diamond (Fe and Ni) could be obtained by using the absorption edges.