J. Phys. IV France 104 (2003) 3
DOI: 10.1051/jp4:200300017

Scanning transmission X-ray microscopy at a bending magnet beamline at the Advanced Light Source

H. Ade¹, A.L.D. Kilcoyne¹, T. Tyliszczak^{2, 3}, P. Hitchcock^{1, 3}, E. Anderson⁴, B. Harteneck⁴, E.G. Rightor⁵, G.E. Mitchell⁵, A.P. Hitchcock³ and T. Warwick<sup>2

1</sup>  Department of Physics, North Carolina Stafe University, Raleigh, North Carolina 27695, U.S.A.
²  Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720, U.S.A.
³  Brockhouse lnstitute of Materials Research, McMaster University, Hamilton, Ontario L8S 4M1, Canada
⁴  Center for X-Ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720, U.S.A.
⁵  Dow Chemical, 1897 Bldg., Midland, MI 48667, U.S.A.

Abstract
During the last two decades, scanning transmission x-ray microscopy (STXM) has evolved into a powerful characterization tool. For best performance, STXM's are located at undulator sources at synchrotron facilities. The scarcity and expense of undulator sourccs and associated beamlines limits the number of availahle STXMs. We have successfully re-examined the use of bending magnets as a source for a STXM and implemented a interferorneter controlled STXM with excellent performance at the beamline 5.3.2. at the Advanced Light Source. Near the carbon K-edge, periodic features with 30 nm half-period could be resolvcd with a zonc plaie that has a 40 nrn outermost zone width with an energy resolution corresponding to 100 meV and an intensity of about 1 MHz. The design and performance of the microscope are described.

© EDP Sciences 2003