| Issue |
J. Phys. IV France
Volume 11, Number PR3, Août 2001
Thirteenth European Conference on Chemical Vapor Deposition
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|
|---|---|---|
| Page(s) | Pr3-109 - Pr3-113 | |
| DOI | https://doi.org/10.1051/jp4:2001314 | |
Thirteenth European Conference on Chemical Vapor Deposition
J. Phys. IV France 11 (2001) Pr3-109-Pr3-113
DOI: 10.1051/jp4:2001314
1 Chemistry Department, M.V. Lomonosov Moscow State University, 119899 Moscow, Russia
2 Institute of General and lnorganic Chemistry, Russian Academy of Sciences, 117907 Moscow, Russia
3 Istituto di Struttura della Materia/CNR, Via del Fosso del Cavaliere 100, 00133 Roma, ltaly
© EDP Sciences 2001
J. Phys. IV France 11 (2001) Pr3-109-Pr3-113
DOI: 10.1051/jp4:2001314
Transition and rare earth metal fluorides as thermal sources of atomic and molecular fluorine
J.V. Rau1, N.S. Chilingarov1, M.S. Leskiv1, V.F. Sukhoverkhov2, V. Rossi Albertini3 and L.N. Sidorov11 Chemistry Department, M.V. Lomonosov Moscow State University, 119899 Moscow, Russia
2 Institute of General and lnorganic Chemistry, Russian Academy of Sciences, 117907 Moscow, Russia
3 Istituto di Struttura della Materia/CNR, Via del Fosso del Cavaliere 100, 00133 Roma, ltaly
Abstract
Transition and rare earth metal fluorides (CoF3, K2NiF6, TbF4 and CeF4) are widely used as solid fluorinating agents. Their thermal decomposition leads to the release of gaseous fluorine. Knudsen cell mass spectrometry has been applied to investigate thermal decomposition of aforementioned fluorinating agents. The characteristic working interval of temperatures and composition of the gas phase for each compound have been determined. According to our findings, fluorine is released both in atomic and molecular forms. F is the main component of the gas phase during TbF4 and K2NiF6 decomposition, which can be used as thermal generators of atomic fluorine.
© EDP Sciences 2001