Proceedings of the Twelfth European Conference on Chemical Vapour Deposition

J. Phys. IV France 09 (1999) Pr8-583-Pr8-588
DOI: 10.1051/jp4:1999873

Er, Yb, and Er, Yb (CO-)doped yttria thin films, deposited by an aerosol assisted MO-CVD process

W. Meffre¹, J.-L. Deschanvres¹, M.-F. Joubert², L. Abello³, J.-C. Joubert¹ and B. Jacquier<sup>2

1</sup>  Laboratoire des Matériaux et du Génie Physique, ENSPG, BP. 46, 38402 Saint-Martin-d'Hères, France
²  Laboratoire de Physico-Chimie des Matériaux Luminescents, Université Claude Bernard - Lyon 1, bâtiment 205, 43 boulevard du 11 novembre 1918, 69622 Villeurbanne cedex, France
³  Laboratoire d'Électrochimie et de Physicochimie des Matériaux et des Interfaces, ENSEEG, BP. 75, 38402 Saint-Mattin-d'Hères, France

Abstract
Er, Yb and Er,Yb : Y₂O₃ thin films were deposited by an aerosol assisted MO-CVD atmospheric process. The source solution (rare earth 2,4-pentanedionates dissolved in butanol) is sprayed using an ultrasonic system. The films were obtained for deposition temperatures between 280°C and 540°C. At high temperature, the films are transparent, polycrystalline and smooth. We have used SEM, X-ray diffraction, EPMA, ellipsometry, and IR spectroscopy, for film characterisation. The Er³⁺ Luminescence was studied in IR and visible, where the classical green transitions have been observed. More, there are numerous evidence of the existence of up-conversion phenornena. A⁴l_13/2 lifetime of 2.2 ms was found for a sample containing 0.6 at. % of Er.

© EDP Sciences 1999