Issue
J. Phys. IV France
Volume 06, Number C5, Septembre 1996
International Field Emission Society
IFES'96
Proceedings of the 43rd International Field Emission Symposium
Page(s) C5-185 - C5-188
DOI https://doi.org/10.1051/jp4:1996530
International Field Emission Society
IFES'96
Proceedings of the 43rd International Field Emission Symposium

J. Phys. IV France 06 (1996) C5-185-C5-188

DOI: 10.1051/jp4:1996530

The Use of STM for Investigation of Surface Relief in Respect to Tribologic Properties of DLC Coatings

V.L. Arbuzov1, V.B. Vykhodets1, I.Sh. Trakhtenberg1, A.E. Davletshin1, O.M. Bakunin1, S.A. Plotnikov1, J.H. Lee2, S.J. Kim2 and B.S. Chung2

1  Institute of Metal Physics, Ural Division of Russian Academy of Sciences, GSP 170, Kovalevskaya St. 18, 620219 Ekaterinburg, Russia
2  Samsung Electronics Co. LTD, Suwon City, Korea


Abstract
The surface relief is one of the main factors defining the trybological properties of friction pairs, especially in the case of diamond and diamond like carbon (DLC) coatings. Even such thin as 10 - 100 nm coating can considerably increase the wear resistance and drastically reduce the friction coefficient of friction pairs. The most convenient techniques for investigation microrelief effect on trybologyc properties of thin films seems to be the scanning tunneling microscopy (STM). The microrelief was changed by surface bombardment with 1 keV ions of O, Ar and N. The fiction coefficients was found to depend upon ion bombardment time and the minimal value could be achieved. The STM studies showed that namely at this time the surface relief was the most smooth. For the coatings in the initial state the surface relief was about 15 - 20 nm and in the state with minimal friction coefficient - about 1.5 - 3 nm.



© EDP Sciences 1996