| Issue |
J. Phys. IV France
Volume 05, Number C5, Juin 1995
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
|
|
|---|---|---|
| Page(s) | C5-601 - C5-605 | |
| DOI | https://doi.org/10.1051/jphyscol:1995571 | |
Proceedings of the Tenth European Conference on Chemical Vapour Deposition
J. Phys. IV France 05 (1995) C5-601-C5-605
DOI: 10.1051/jphyscol:1995571
Max-Planck-Institut für Biophysikalische Chemie, P.O. Box 2841, 37018 Göttingen, Germany
© EDP Sciences 1995
J. Phys. IV France 05 (1995) C5-601-C5-605
DOI: 10.1051/jphyscol:1995571
Laser-CVD 3D Rapid Prototyping of Laser Driven Moveable Micro-Objects
O. Lehmann and M. StukeMax-Planck-Institut für Biophysikalische Chemie, P.O. Box 2841, 37018 Göttingen, Germany
Abstract
Using continuous wave visible (514 nm, 488 nm) laser beams and the gaseous precurcsors trimethylamine alane (CH3)3NAlH3 and oxygen, free-standing three-dimensional (3D) Al2O3 ceramic microstructures can be directly written under software control. By suitable laser irradiation, parts of these 3D microobjects can be moved through thermal expansion forces. This is a first step towards laser rapid prototyping of optically driven 3D microobjects such as microtweezers and microrobots. Examples will be presented.
© EDP Sciences 1995