| Issue |
J. Phys. IV France
Volume 04, Number C7, Juillet 1994
8th International Topical Meeting on Photoacoustic and Photothermal Phenomena8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique |
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|---|---|---|
| Page(s) | C7-167 - C7-170 | |
| DOI | https://doi.org/10.1051/jp4:1994740 | |
8th International Topical Meeting on Photoacoustic and Photothermal Phenomena
8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique
J. Phys. IV France 04 (1994) C7-167-C7-170
DOI: 10.1051/jp4:1994740
1 FSU Jena, Inst.f. Festkörperphysik, Helmholtzweg 5, 07743 Jena, Germany
2 Jenawave Engn. & Consult., Friedrich-Schelling-Str. 11, 07745 Jena, Germany
3 FHG, IIS Erlangen, Artilleriestr. 12, 91052 Erlangen, Germany
© EDP Sciences 1994
8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique
J. Phys. IV France 04 (1994) C7-167-C7-170
DOI: 10.1051/jp4:1994740
In-situ investigation of ion implantation processes by thermal wave analysis
H. Schlemm1, H.D. Geiler2 and A. Kluge31 FSU Jena, Inst.f. Festkörperphysik, Helmholtzweg 5, 07743 Jena, Germany
2 Jenawave Engn. & Consult., Friedrich-Schelling-Str. 11, 07745 Jena, Germany
3 FHG, IIS Erlangen, Artilleriestr. 12, 91052 Erlangen, Germany
Abstract
High-fluence N+-implantation in steel is monitored by use of nondestructive and contactless photothermal measurements during the implantation process. The modulated reflectivity is correlated with the results of Knoop hardness testing. On-line measurements on the steel surface and direct ion beam monitoring from the back side of a monitor sample are demonstrated. The maximum of the ion implantation induced hardness is strongly correlated with the phase transition indicated by the thermomodulated dielectric function.
© EDP Sciences 1994